期刊名：Micromachines

期刊主页：https://www.mdpi.com/journal/micromachines

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本期精选了发表于 Micromachines 的10篇研究论文与综述，涵盖压电驱动与精密控制、MEMS微镜、惯性传感、微型开关及功能材料等多个研究方向，聚焦器件设计、智能控制与性能优化等关键技术，带你快速了解MEMS领域的研究进展与创新成果！

1. A Comprehensive Review of Piezoelectric Ultrasonic Motors: Classifications, Characterization, Fabrication, Applications, and Future Challenges

压电超声电机综述：分类、表征、制造、应用及未来挑战

https://www.mdpi.com/2072-666X/15/9/1170

Naz, S.; Xu, T.-B. A Comprehensive Review of Piezoelectric Ultrasonic Motors: Classifications, Characterization, Fabrication, Applications, and Future Challenges. Micromachines 2024, 15, 1170.

2. Driving Principle and Stability Analysis of Vertical Comb-Drive Actuator for Scanning Micromirrors

扫描微镜用垂直梳齿驱动器的驱动原理与稳定性分析

https://www.mdpi.com/2072-666X/15/2/226

Shan, Y.; Qian, L.; Wang, J.; Wang, K.; Zhou, P.; Li, W.; Shen, W. Driving Principle and Stability Analysis of Vertical Comb-Drive Actuator for Scanning Micromirrors. Micromachines 2024, 15, 226.

3. Combined Control for a Piezoelectric Actuator Using a Feed-Forward Neural Network and Feedback Integral Fast Terminal Sliding Mode Control

基于前馈神经网络与反馈积分快速终端滑模控制的压电执行器联合控制

https://www.mdpi.com/2072-666X/15/6/757

Artetxe, E.; Barambones, O.; Calvo, I.; del Rio, A.; Uralde, J. Combined Control for a Piezoelectric Actuator Using a Feed-Forward Neural Network and Feedback Integral Fast Terminal Sliding Mode Control. Micromachines 2024, 15, 757.

4. Ceramics for Microelectromechanical Systems Applications: A Review

微机电系统应用中的陶瓷材料：综述

https://www.mdpi.com/2072-666X/15/10/1244

Fallah Nia, E.; Kouki, A. Ceramics for Microelectromechanical Systems Applications: A Review. Micromachines 2024, 15, 1244.

5. Advancements in MEMS Micromirror and Microshutter Arrays for Light Transmission Through a Substrate

面向基板透光传输的 MEMS 微镜与微快门阵列技术进展

https://www.mdpi.com/2072-666X/16/1/103

Baby, S.; Iskhandar, M.S.Q.; Hasan, M.K.; Liebermann, S.; Chen, J.; Qasim, H.; Liu, S.; Farrag, E.; Löber, D.; Ahmed, N.; et al. Advancements in MEMS Micromirror and Microshutter Arrays for Light Transmission Through a Substrate. Micromachines 2025, 16, 103.

6. Multi-Frame Vibration MEMS Gyroscope Temperature Compensation Based on Combined GWO-VMD-TCN-LSTM Algorithm

基于 GWO-VMD-TCN-LSTM 组合算法的多框架振动 MEMS 陀螺仪温度补偿https://www.mdpi.com/2072-666X/15/11/1379

Li, A.; Cui, K.; An, D.; Wang, X.; Cao, H. Multi-Frame Vibration MEMS Gyroscope Temperature Compensation Based on Combined GWO-VMD-TCN-LSTM Algorithm. Micromachines 2024, 15, 1379.

7. Implementation of Highly Reliable Contacts for RF MEMS Switches

射频MEMS开关高可靠性接触点的实现

https://www.mdpi.com/2072-666X/15/1/155

Jiang, L.; Wang, L.; Huang, X.; Huang, Z.; Huang, M. Implementation of Highly Reliable Contacts for RF MEMS Switches. Micromachines 2024, 15, 155.

8. Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors

集成压阻传感器的静电驱动 MEMS 二维扫描微镜

https://www.mdpi.com/2072-666X/15/12/1421

Shan, Y.; Qian, L.; He, K.; Chen, B.; Wang, K.; Li, W.; Shen, W. Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors. Micromachines 2024, 15, 1421.

9. Recent Advances in Piezoelectric Compliant Devices for Ultrahigh-Precision Engineering

压电柔性器件在超精密工程中的最新进展

https://www.mdpi.com/2072-666X/15/12/1456

Wu, Z.; Wu, Z.; Chen, I.-M.; Xu, Q. Recent Advances in Piezoelectric Compliant Devices for Ultrahigh-Precision Engineering. Micromachines 2024, 15, 1456.

10. Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications

面向功率开关应用的横向驱动硅-硅直流 MEMS 开关

https://www.mdpi.com/2072-666X/15/11/1295

Shuaibu, A.H.; Rabih, A.A.S.; Blaquière, Y.; Nabki, F. Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications. Micromachines 2024, 15, 1295.

期刊介绍

主编：Prof. Dr. Nam-Trung Nguyen, Griffith University, Australia

Micromachines (ISSN 2072-666X) 是一个聚焦微/纳米尺度结构、材料、器件与系统的国际性同行评审开放获取期刊。期刊旨在为微纳科学与技术领域的前沿研究提供高水平交流平台，其研究范围涵盖从基础到应用的微纳技术全领域，包括但不限于：微/纳机电系统（MEMS/NEMS）；传感器与执行器；光学与光电器件；微/纳米尺度能量收集技术；压电与摩擦电纳米发电机；生物微机电系统（BioMEMS）、微型生物传感器、器官芯片；微/纳流控、微全分析系统（μ-TAS）与即时检测（POCT）芯片；以及基于新型材料的微/纳米结构、器件与系统的开发与应用。目前，Micromachines已被 SCIE (Web of Science)、PubMed、PMC、Ei Compendex、Scopus等多个国际重要数据库收录。

2025 Impact Factor: 3.5

2025 CiteScore: 7.1

Time to First Decision: 16.6 Days

Acceptance to Publication: 2.6 Days